1600°C Vacuum Atmosphere Tube Furnace for Semiconductor R&D with ±1°C Temperature Uniformity

1. Integrated safety protections include automatic power-off when the furnace door is opened, over-temperature shutdown, and leakage prevention, ensuring secure operation at all times.

2. Equipped with an imported programmable temperature control system featuring 4 curves and up to 40 programmable segments. Its 7-inch touchscreen supports 50 built-in formulas and user-defined programs, with options to add, delete, or transfer formulas as needed.

3. The furnace chamber is constructed using vacuum-adsorbed polycrystalline mullite fiber, which ensures a uniform temperature field and reduces energy consumption by over 50%.

4. Gas path connections utilize a quick-connect flange structure, enabling tool-free loading and unloading that can be completed with just a single clamp for enhanced operational efficiency.

5. The gas circuit assembly is fabricated from food-grade 316 stainless steel, offering superior corrosion resistance, high-temperature tolerance, excellent mechanical strength, and non-magnetic properties.

6. The electrical system employs continuous heating output, dual-circuit power supply, and separate wiring for strong and weak currents, significantly enhancing overall system stability.

7. The heating module uses DC signals to regulate output power, effectively eliminating interference from induced currents on control signals.

8. Upon furnace startup, the exhaust fan activates automatically. Post-experiment, it continues operating until the furnace body temperature drops below 60 °C, then shuts off automatically to protect the furnace surface from overheating damage.

9. Proprietary air-diversion thermal insulation technology extends the service life of internal components while maintaining consistent temperature uniformity within the furnace chamber.

10. Operation is safe and intuitive thanks to low-pressure metal buttons integrated with built-in status indicator lights that clearly display equipment operating conditions.