1200°C Open Type Vacuum Atmosphere Tube Furnace CVD System with Precision Vacuum Control for Semiconductor R&D
Engineered to provide a 1200°C high-temperature experimental environment with vacuum and controllable atmospheres, this vacuum atmosphere tube furnace CVD system supports semiconductor, nanotechnology, carbon fiber sectors, plus processes like SiC coating and MLCC sintering.
- modelCVD-LTF12P/ CVD-LTF12T Series
- brandLABEKS
- min. order1 pcs
- packageplywood case package
description
This system is purpose-built to deliver a 1200°C high-temperature experimental environment with vacuum capability and fully controllable atmospheric conditions, serving the semiconductor, nanotechnology, and carbon fiber industries.
Optimized for a range of CVD processes, it supports silicon carbide coating application, ceramic substrate conductivity testing, controlled ZnO nanostructure growth, and MLCC atmosphere sintering experiments.
features
1. Operational safety is ensured by automatic power-off upon furnace door opening, over-temperature protection, and leakage protection mechanisms.
2. Constructed with polycrystalline mullite fiber via vacuum adsorption, the furnace achieves uniform temperature distribution and reduces energy consumption by over 50%.
3. Proprietary air diversion and heat insulation technology extends the service life of internal components while maintaining consistent temperature performance within the chamber.
4. Low-voltage metal operation buttons with status indicator lights enable safe, intuitive, and straightforward operational control.
5. Aviation plugs connect the upper and lower furnace bodies, providing a secure, reliable, and user-friendly connection interface.
6. The circuit system incorporates continuous heating output, dual-circuit power supply, and separated strong/weak current wiring to enhance overall system stability.
7. The heating module utilizes DC signal for output power adjustment, eliminating interference from induced electricity to control signals.
8. Gas circuit assemblies are fabricated from food-grade 316 stainless steel, offering excellent corrosion resistance, atmospheric resistance, high temperature tolerance, and non-magnetic properties.
9. The exhaust fan activates automatically when the furnace starts and continues running until the furnace body temperature drops below 60°C, then shuts off automatically to protect the furnace exterior.
10. Equipped with a digital flow display instrument paired with a mass flow controller for data collection and flow regulation, the gas mass flow control system boasts superior repeatability, fast response, and stable, reliable operation.
11. The medium vacuum control system supports automatic and manual control switching: automatic mode maintains the chamber within a preset vacuum pressure range by automatically activating/deactivating the vacuum pump, while manual mode allows direct operation via dedicated buttons to accommodate diverse experimental needs.
12. Solenoid valve slow-start technology integrated into the medium vacuum control system delays valve activation by 10 seconds after vacuum pump startup, ensuring precise pressure maintenance in the furnace tube and preventing exhaust gas backflow that could impair experimental outcomes.
specifications
Model | CVD-LTF12P50 | CVD-LTF12P60 | CVD-LTF12P80 | CVD-LTF12P100 |
|---|---|---|---|---|
CVD-LTF12T50 | CVD-LTF12T60 | CVD-LTF12T80 | CVD-LTF12T100 | |
CVD-LTF12P50S | CVD-LTF12P60S | CVD-LTF12P80S | CVD-LTF12P100S | |
CVD-LTF12T50S | CVD-LTF12T60S | CVD-LTF12T80S | CVD-LTF12T100S | |
Operating temperature range | 300-1200°C | |||
temperature resolution | 1°C | |||
temperature accuracy | ±1°C | |||
Heating rate | 0-20°C/min | |||
Heating zone length | 420mm | |||
Length of constant temperature zone | Single temperature zone：210mm；Double temperature zone：280mm | |||
maximum vacuum | -0.1MP3 | |||
Empty furnace heating time | ≤15min | |||
Heating rate when configuring furnacetube | Below 500°C≤5°C/min；500-800≤ 10°C/min；800-1000≤5°C/min；1000-1200≤2t°C/min | |||
Exterior | Cold-rolled steel sheets – surfacechemical resistant coating | |||
Furnace body | Polycrystalline Mullite Fiber | |||
Furnace size | Outside：φ240-550mm；Inner：φ120*420mm | |||
Furnace tube | Quartz tube | |||
Furnace tube size | φ50/43*1000 | φ60/53*1000 | φ80/72*1000 | φ100/92*1000 |
Heater | Nickel-chromium-aluminum alloy wireOCr27A17MO2 | |||
Heating power | Single temperature zone：3KW：Double temperature zone：3.2KW | |||
Thermal insulation layer | Double-layer forced air diversion | |||
Open way | Clamshell back flip (about 100degrees) | |||
Controller | P: Imported program temperaturecontrol digital display; T: 7-inch color touch screen program temperaturecontrol | |||
Control method | Using microcomputer PID control /S-type dual temperature zone single temperature control | |||
Set type | P: Touch five buttons for action,digital display setting; T: Finger touch and tap to set | |||
Display method | P: double-line LED digital display; T:color LCD display | |||
Timing | 0-999.9h | |||
Run function | Fixed value operation. Programoperation | |||
Program mode | P: Program running, 4 curves, a totalof 40 steps; T: Maximum 50 steps, the stored program can be called | |||
Sensor | Type K thermocouple | |||
Auxiliary function | P: Correction function; T: Correctionfunction, real-time curve recording, U disk data export | |||
Safety equipment | Overcurrent leakage protection switch | |||
Number of air paths | 3 channels (the number of air channelscan be selected according to specific needs) | |||
Flow range | 0-0500sccm (Standard ml/min, optional)Nitrogen standard | |||
Precision | ±1%F.S | |||
Response time | ≤4s | |||
Operating temperature (flow meter) | 5-45°C | |||
Work pressure | Inlet pressure 0.05-0.3MPa (gaugepressure) | |||
System connection | Adopt KF quick connection bellows,high vacuum manual flapper valve and digital display vacuum measuringinstrument | |||
System vacuum range | 10-100Pa | |||
Vacuum pump | The theoretical ultimate vacuum degreeof the two-stage mechanical pump is 3×10-1Pa, the pumping rate is 4L/S, theair outlet is equipped with an oil filter, the rated voltage is 200V, and thepower is 0.55Kw | |||
CVD system configuration | 1200 degree open vacuum tube furnace(optional single temperature zone, double temperature zone) Multi-channelmass flow control system twisted vacuum system | |||
Furnace body dimensions | 980mm*400mm*600mm | |||
System Dimensions | 770mm*580mm*778mm | |||
Total system weight | 210kg | |||
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