1400°C Vacuum Atmosphere Tube Furnace for Semiconductor & Nanotech Applications
Designed to deliver vacuum, controlled-atmosphere, and high-temperature experimental environments, this vacuum atmosphere tube furnace supports critical work in semiconductor, nanotechnology, and fiber sectors.
- modelLTF-1400
- brandLABEKS
- min. order1 pcs
- packageplywood case package
description
Our 1400°C vacuum atmosphere tube furnace provides a controlled experimental environment with vacuum, regulated atmosphere, and high-temperature conditions, catering to semiconductor, nanotechnology, fiber, and related fields.
features
1. Equipped with automatic power-off, over-temperature protection, and leakage protection mechanisms to ensure consistent operational safety.
2. Integrates an imported programmable temperature control system with 4 curves and up to 40 programmable segments; its 7-inch touchscreen includes 50 pre-stored formulas and programs, enabling users to freely set, add, delete, or transfer custom formula names.
3. Constructed with vacuum-adsorbed polycrystalline mullite fiber insulation, ensuring a uniform temperature field and energy savings of over 50%.
4. Offers automatic compensation for temperature control deviations caused by temperature fluctuations or aging of silicon carbide rod resistance, eliminating inaccuracies and risks linked to manual adjustments.
5. The heating module uses DC signals to regulate output power, effectively preventing induction current interference with control signals.
6. Adopts a continuous heating output mode with dual-circuit power supply and separate wiring for high and low voltage currents, boosting overall system stability.
7. Utilizes a quick-connect flange structure for gas path connections, enabling fast loading and unloading operations with just one clamp.
8. Gas circuit components are fabricated from food-grade 316 stainless steel, delivering excellent corrosion resistance, atmospheric resistance, high-temperature tolerance, and non-magnetic properties.
9. The exhaust fan activates automatically when the furnace starts up and continues running post-experiment until the furnace surface temperature drops below 60°C, effectively protecting the furnace exterior.
10. Features low-pressure metal operation buttons with integrated status indicators for safe, intuitive operation.
11. Our proprietary air-diversion thermal insulation technology extends the service life of internal components and maintains reliable constant-temperature performance within the chamber.
specifications
Model | LTF14P40 | LTF14P50 | LTF14P60 | LTF14P80 |
|---|---|---|---|---|
LTF14T40 | LTF14T50 | LTF14T60 | LTF14T80 | |
Temp. Range | 300~1400℃ | |||
Temp. Resolution | 1℃ | |||
Temp. Uniformity | ±1℃ | |||
Heating rate | 0-20 ℃ / min | |||
heating zone | 200mm | 400mm | ||
Constanttemp zone | 70mm | 140mm | ||
Maximumvacuum | – 0.1MPa | |||
Shell | cold rolledsteel plate, surface temperature treatment | |||
Chambermaterials | polycrystallinemullite fiber | |||
Chamber size | 360*350*350 | 560*350*350 | ||
Tube | alumina tube | |||
Tube size | Φ40/34*1000 | Φ50/44*1000 | Φ60/50*1000 | Φ80/70*1000 |
Thermalinsulation layer | double-layerforced wind diversion | |||
Heatingelement | siliconcarbide rod | |||
HeatingPower | 3kw | 5kw | ||
Controller | P:Importedprogram controlled temperature digital display; T:Seven inch color touchscreen program temperature control | |||
Control Mode | MicrocomputerPID control /S type Separate temp control in double heating zone | |||
Setting Mode | P: Slightlytouch five buttons, digital setting mode; T: Touch setting mode | |||
Display Mode | P:Double rowLED digital display; T: Color LCD display | |||
Timing | 0~999.9hours | |||
OperationFunction | Set valuerun, program run | |||
Program mode | P:Programoperation, four curves, a total of 40 steps;T:Maximum 50 steps, adjustablestorage program | |||
Sensor | K-typethermocouple | |||
AuxiliaryFunction | P:correctionfunction; T: correction function, Real-time curve recording, U disk data export | |||
SafetyDevice | over currentand leakage protection switch | |||
Dimensions | 1531*500*728mm | |||
Package size | 1120*630*1060mm | |||
Weight | 95kg | |||
Power Supply | AC220V 50Hz | |||
StandardConfiguration | A set of gascircuit assembly (including vacuum gauge),A pair of high temperature gloves. 1alumina tube, 2 alumina plugs, 2 alumina boats, 1 hook | |||
why choose us
Premium Quality with CE & ISO
We conduct 100% performance testing on every unit, ensuring its stable operation and superior performance in your application.
24/7 Expert Technical Support
Our senior engineers are on standby 24/7, ready to provide expert solutions at any time to minimize your operational downtime.
20+ Years R&D & Production
Our deep technical expertise is your solid guarantee for professional and reliable OEM/ODM services.
Trusted in 80+ Countries
Industry leaders and research institutions in over 80 countries and regions rely on our equipment for stable operation.
True Manufacturer, Factory-Direct Price
Bypass the middlemen to get our factory pricing and speak directly with our core engineers.
Rapid & Reliable Delivery
Our extensive in-stock inventory provides a solid guarantee for rapid and reliable global delivery.

Our Factory
20 Years
58 Experts
20000 m²
7X24 Hours
