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Open Type Vacuum Atmosphere Tube Furnace for Semiconductor Applications with 50%+ Energy Savings

Engineered to supply a vacuum, controlled-atmosphere and high-temperature experimental environment, this Vacuum Atmosphere Tube Furnace supports critical work in semiconductor, nanotechnology and fiber sectors.

  • model
    LTF-1200
  • brandLABEKS
  • min. order1 pcs
  • packageplywood case package

description

This open-type vacuum atmosphere tube furnace delivers a reliable vacuum, controlled-atmosphere and high-temperature experimental setting, suitable for semiconductor development, nanotechnology research and fiber material processing applications.

features

Integrated safety protections include automatic power-off when the furnace door is opened, overtemperature shutdown and leakage prevention, ensuring safe operation at all times.

Equipped with an imported programmable temperature control system featuring 4 curves, 40 programmable segments, a large touchscreen, 50 built-in formulas and programs. Users can customize formula names, as well as add, delete or transfer formulas freely.

Constructed with vacuum-adsorbed polycrystalline mullite fiber insulation, the furnace boasts a uniform temperature field and achieves over 50% energy savings compared to conventional models.

Designed with a split upper and lower furnace body; the upper section can be flipped back 100° for easy loading, unloading and observation of materials.

Gas circuit components are made from food-grade 316 stainless steel, offering excellent corrosion resistance, high-temperature tolerance, structural strength and non-magnetic properties.

The gas path utilizes a quick-connection flange structure that enables fast assembly and disassembly with just one clamp.

Independently developed air diversion thermal insulation technology ensures extended service life and consistent temperature stability for all internal components.

Upon furnace startup, the exhaust fan operates automatically. After experiments conclude, the fan continues running until the furnace surface temperature drops below 60℃, then shuts off automatically to effectively protect the furnace body.

The circuit adopts continuous heating output, dual-circuit power supply and separate wiring for strong and weak currents, significantly enhancing system stability.

The heating module uses DC signal regulation for output power, eliminating interference from induced currents on control signals.

Low-pressure metal buttons with status indicators are selected for operation, ensuring safe and intuitive control.

The upper and lower furnace bodies are connected via aviation plugs, providing a safe, reliable and convenient connection method.

specifications

Model

LTF12P50

LTF12T50

LTF12P60

LTF12T60

LTF12P80

LTF12T80

LTF12P100

LTF12T100

LTF12P50S

LTF12T50S

LTF12P60S

LTF12T60S

LTF12P80S

LTF12T80S

LTF12P100S

LTF12T100S

Temp. Range

300~1200℃

Temp. Resolution

1℃

Temp. Uniformity

±1℃

Heating rate

0-20 ℃ / min

heating zone

420mm length

Constanttemp. zone

Single zone:210mm length /Double zone:280mm

Maximumvacuum

– 0.1MPa

Heating timeof empty furnace

＜15min; Below500℃≤5℃/min,500~800℃≤10℃/min,800-1000℃≤5℃/min,1000~1200℃≤2℃/min

Shell

cold rolledsteel plate, surface temperature treatment

Chambermaterials

polycrystallinemullite fiber

Chamber size

Externaldimension: φ 240 * 550mm inner size: φ 120*420mm

Tube

quartz tube

Tube size

Φ50/43

*1000

Φ50/43

*1000

Φ60/53

*1000

Φ60/53

*1000

Φ80/72

*1000

Φ80/72

*1000

Φ100/92

*1000

Φ100/92

*1000

Thermalinsulation layer

double-layerforced wind diversion

Heatingelement

Ni Cr Alalloy wire OCr27AL7Mo2

HeatingPower

Singlezone:3kw /Double zone:3.2kw

Open Mode

flip back(about 100 degrees)

Controller

P:Importedprogram controlled temperature digital display; T:Seven inch color touchscreen program temperature control

Control Mode

MicrocomputerPID control /S type Separate temp control in double heating zone

Setting Mode

P: Slightlytouch five buttons, digital setting mode; T: Touch setting mode

Display Mode

P:Double rowLED digital display; T: Color LCD display

Timing

0~999.9hours

OperationFunction

Set valuerun, program run

Program mode

P:Programoperation, four curves, a total of 40 steps; T:Maximum 50 steps, adjustablestorage program

Sensor

K-typethermocouple

AuxiliaryFunction

P:correctionfunction; T: correction function, Real-time curve recording, U disk dataexport

SafetyDevice

over currentand leakage protection switch

Dimensions

1531*440*600(mm)

Package size

1120*580*945(mm)

Weight

85kg

Power Supply

AC220V 50Hz

StandardConfiguration

A set of gascircuit assembly (including vacuum gauge),A pair of high temperature gloves. 1quartz tube, 2 quartz plugs, 2 quartz boats, 1 hook

why choose us

  • Premium Quality with CE & ISO

    We conduct 100% performance testing on every unit, ensuring its stable operation and superior performance in your application.

  • 24/7 Expert Technical Support

    Our senior engineers are on standby 24/7, ready to provide expert solutions at any time to minimize your operational downtime.

  • 20+ Years R&D & Production

    Our deep technical expertise is your solid guarantee for professional and reliable OEM/ODM services.

  • Trusted in 80+ Countries

    Industry leaders and research institutions in over 80 countries and regions rely on our equipment for stable operation.

  • True Manufacturer, Factory-Direct Price

    Bypass the middlemen to get our factory pricing and speak directly with our core engineers.

  • Rapid & Reliable Delivery

    Our extensive in-stock inventory provides a solid guarantee for rapid and reliable global delivery.

Our Factory

Our factory is powered by a professional and dedicated team. Their commitment to a serious and responsible approach ensures the consistency and reliability of every instrument we build. Our R&D team is composed of experienced engineers specializing in design, technology, and process control.
Our R&D team is composed of experienced engineers specializing in design, technology, and process control. Our strict Quality Control System governs the entire process—from initial design and testing to final production and inspection.

20 Years

Laboratory Solution

58 Experts

In Research & Design

20000 m²

Industrial Plant

7X24 Hours

Expert Support
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